A Rutherford backscattering spectrometer (RBS) system can be applied to the study of surface coatings. The technique permits the study of inhomogeneous surface layers, including a determination of the ...
The construction of compact semiconductors with reduced thickness and size is desirable for their application in microelectronic devices and transistors. However, measuring the parameters such as ...
A new technical paper titled “Quantification of area-selective deposition on nanometer-scale patterns using Rutherford backscattering spectrometry” was published by researchers at IMEC and KU Leuven. ...
Electron Detection -- Photoelectron Spectroscopy -- Auger Electron Spectroscopy (AES) / H. Bubert & J. Rivir̈e -- Electron Energy-Loss Spectroscopy (EELS) / R ...
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